Diffusion Furnace Applications for MEMS and Semiconductors
With over 30 years of experience manufacturing high-technology diffusion furnaces and refurbished systems, Expertech has provided over 1500 furnace process tubes and more than 100 vertical furnaces. Our solutions are designed for semiconductor and MEMS processing applications in both Atmospheric and LPCVD capabilities, including optimizations for the best possible match to your facility’s needs. Offering a range of services and training opportunities, we have new, remanufactured, certified used, and as-is diffusion furnaces for your application requirements.
Diffusion Furnaces for Processing MEMS
Expertech manufactures CTR and VTR diffusion furnaces for processing MEMS devices. With high-technology features, the CTR and VTR systems deliver exceptional film uniformity, high-performance LPCVD and atmospheric capabilities, and lower intrinsic stress to process MEMS devices, including small-scale sensors, actuators, and more. We can engineer and develop a compact or vertical diffusion furnace solution configured with the capabilities you need to match your application requirements.
Applications of Semiconductor Diffusion Furnaces
For LPCVD and atmospheric pressure processing applications, Expertech’s semiconductor diffusion furnaces offer innovative solutions for your process requirements. CTR and VTR systems deliver precision film uniformity and low defect density required in demanding operations for semiconductor, SiC, GaN, and MEMS device processing applications. Engineered to suit a range of process capabilities, our solutions can be configured with specialized features to match your application specifications.
Benefits of CTR Diffusion Furnaces
Designed with capabilities surpassing tabletop or laboratory furnace systems, CTR diffusion furnaces offer fully automated, recipe-driven film quality and process uniformity that rivals full-size equipment. CTR systems can process up to 200 mm round, 156 mm square, and irregularly shaped parts for MEMS and semiconductor applications. With similar capabilities to standard-size equipment, our compact diffusion furnaces provide superior performance, as well as complete recipe control and storage via a host PC supervisor for data logging and graphics. We provide CTR systems with manual or fully automated loading systems for high-quality advantages, including:
- Highly Reliable with Fully Automated Technology
- Utilizes High-Performance Heating Elements
- Designed for Atmospheric & LPCVD Applications
- Full Suite of Safety Interlocks
- Integrated Control System with GUI for Interfacing with Multiple Tools
- Smallest Footprint in Equipment Class with a Compact Design
- Stackable Design to Accommodate 4 CTR-125, 4 CTR-150, 3 CTR-200, and varies in CTR-300
- Features Process Controller Options
- Controlled Rate of Wafer Load & Unload with Optional Recipe Controlled Loading Mechanism
- Reduced Cost of Ownership
VTR Diffusion Furnace Advantages
VTR systems offer highly automated solutions combined with powerful design features. They have one of the most well-known furnace designs and a small footprint for exceptional within-wafer and wafer-to-wafer uniformity in atmospheric and LPCVD processes. Featuring a unique dual-boat design, our VTR diffusion furnaces offer proven production capabilities for maximum semiconductor processing, as well as high-quality components for reduced contamination. We supply VTR systems as an advanced manufacturing tool with the following benefits:
- Manufacturing Versatility
- Enhanced Automation & Throughput
- Optimized Contamination Management
- Low Cost of Ownership
Contact Us About Diffusion Furnaces for MEMS and Semiconductor Applications
Expertech is a leading provider of thermal processing solutions for MEMS and semiconductor applications. Our inventory includes new and refurbished vertical, compact, and horizontal reactor systems featuring atmospheric and LPVCD capabilities for reliable processing platforms compatible with various applications. Backed by a full suite of services and a highly operational facility, we offer a full suite of services and training to ensure the longevity and performance of your diffusion furnace equipment.
Discover the Expertech Advantage through competitive prices, efficient deliveries, and satisfaction guaranteed. Contact us for more information about our diffusion furnace solutions or request a quote to begin.