Why Choose Expertech for Your Thermal Processing Equipment

Expertech offers over 30 years of experience manufacturing the latest diffusion furnaces and refurbished systems. We have supplied over 1500 furnace process tubes and more than 100 vertical furnaces. This includes new, remanufactured, certified used, and as is. Our diverse offerings are suited for a wide variety of thermal processes in both Atmospheric and LPCVD applications.

With comprehensive technical support services for field operations, we have successfully upgraded or converted over 200 thermal processing systems, more than 100 of which took place in the field. Expertech’s field services are used to support over 1000 furnace systems worldwide.

Supplier of High-Performance Diffusion Furnaces

All thermal processing equipment from Expertech is optimized to provide the best possible match to support your individual requirements. [KJ1] We offer a selection of configurations with varying capabilities to meet your needs. Explore our inventory for a solution that suits your processing requirements:

The CTR Series offers advanced automated technology in a compact design, providing film quality and uniformity comparable to large batch systems. These are perfect for pilot lines, R&D, and academic applications. Meanwhile, the established VTR vertical reactors can provide enhanced uniformity and minimize contamination with a dual-boat design, making this equipment ideal for[KJ2] volume production environments.

For high-volume processing in the semiconductor, MEMS, and solar industries, large-batch horizontal systems offer high throughput capabilities to match your operations. If you require a more customized approach, refurbished systems are manufactured to your exact process requirements and enhanced with additional functionalities as required.

Global Presence as a Partner of Education, Research, and Industry

As a manufacturer of high-performance thermal processing equipment, we are a trusted partner of universities, research facilities, and industry leaders. For over 30 years, Expertech has understood the requirements of diffusion furnaces for various applications, providing solutions designed to satisfy the specific needs of your facility and operations. Delivering reliable and consistent performance, our diffusion furnaces are used by:

Global Foundries
NXP
MIT
Skyworks
MicroChip
Silex Microsystems
And many more

Expertech’s thermal processing equipment is developed through innovative engineering and top-quality workmanship. Our manufacturing efforts are supported by technical assistance, maintenance, refurbishment, and installation services to continuously meet the ever-changing reactor needs of thermal processing operations.

Offering Comprehensive Support Services to Maintain Your Systems

When you choose Expertech, you get more than thermal processing equipment. We offer a full suite of services to ensure your reactor operates as it should for as long as possible. With one of the largest inventories of thermal reactor parts for current and obsolete systems, we can adapt, repair, and improve the functionality of your systems.

Between a fully equipped facility and an expert-backed field service program, we can troubleshoot issues, maintain and support an extensive variety of systems, and offer on-site retrofitting or installation based on your needs. Our services include:

Discover Powerful Thermal Processing Equipment Manufacturing at Expertech

Expertech is a leading provider of new and refurbished vertical, compact, and horizontal reactor systems. To meet the specific needs of your facility and operations, our diffusion and LPCVD furnaces are designed to provide a highly reliable platform across a wide range of process applications, supported by a comprehensive inventory of OEM parts for maintenance and repairs.

With the Expertech Advantage, we can deliver competitive prices and efficient deliveries to ensure your requirements are met and your satisfaction is guaranteed. Contact us to discuss your thermal processing specifications or request a quote today.